In-Process Atomic-Force Microscopy (AFM) Based Inspection
نویسندگان
چکیده
منابع مشابه
In-Process Atomic-Force Microscopy (AFM) Based Inspection
A new in-process atomic-force microscopy (AFM) based inspection is presented for nanolithography to compensate for any deviation such as instantaneous degradation of the lithography probe tip. Traditional method used the AFM probes for lithography work and retract to inspect the obtained feature but this practice degrades the probe tip shape and hence, affects the measurement quality. This pape...
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ژورنال
عنوان ژورنال: Sensors
سال: 2017
ISSN: 1424-8220
DOI: 10.3390/s17061194